DTU Cen has a suite of seven complementary electron microscopes, comprising four scanning electron microscopes (SEMs), two of which are dual beam (an SEM combined with a focussed ion beam, FIB), and three transmission microscopes (TEMs). Two of the three TEMs are state of the art, “high end” instruments.
DTU Cen has a suite of seven complementary electron microscopes, comprising four scanning electron microscopes (SEMs), two of which are dual beam (an SEM combined with a focussed ion beam, FIB), and three transmission microscopes (TEMs). Two of the three TEMs are state of the art, “high end” instruments.
Scanning microscopes are generally used when topographical information from a sample is required and the dual beams are mainly used for three-dimensional characterisation and site-specific TEM sample preparation. In contrast, when structural/compositional information is required at the sub nm level, a TEM is the tool which is used.
There are numerous ways to utilise the strong electron/sample interactions that take place inside an electron microscope with appropriate detectors, many of which are available at DTU Cen.
In addition, there are a number of computers available for off-line image and spectral data analysis, image simulation, and image reconstruction.
Notable Acronyms:
BSE – Back Scattered Electron(s)
SE – Secondary Electron(s)
BF – Bright Field
DF – Dark Field
HAADF – High Angle Annular Dark Field
HRTEM – High Resolution Transmission Electron Microscopy
SAED – Selected Area Electron Diffraction
STEM – Scanning Transmission Electron Microscopy
BF – Bright Field
BSE – BackScattered electron(s)
CCD – Charge Coupled Device
DF – Dark Field
EBSD – Electron BackScatter Diffraction
EDS, EDX, EDXS – Energy Dispersive X-ray Spectroscopy
EELS – Electron Energy-Loss Spectroscopy
EFTEM – Energy-Filtered Transmission Electron Microscopy
FEG – Field Emission Gun
HAADF – High Angle Annular Dark Field
HRTEM – High-resolution Transmission Electron Microscope
GIF – Gatan Image Filter
IGP – Ion Getter Pump
ODP – Oil Diffusion Pump
SAED – Selected Area Electron Diffraction
SDD – Silicon Drift Detector
SE – Secondary Electron(s)
SEM – Scanning Electron Microscope
STEM – Scanning Transmission Electron Microscope
TEM – Transmission Electron Microscope
TMP – Turbo Molecular Pump
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