The Helios EBS3 is a dual beam electron microscope, used primarily for electron back-scatter diffraction (EBSD) investigations in 2D and 3D. However, it is also a tool that can be utilised to prepare high quality TEM lamellas via FIB milling, for chemical characterisation via EDS, and to produce very high spatial resolution images at low voltages.
Electron source: Field emission gun
Ion source: Ga+ ions
Accelerating voltage: 500 V- 30 kV
Resolution: Better than 1.5 nm at 1 kV (SE)
Imaging detectors: Everhart-Thornley (SE/BSE), Thru-the-Lens, Large Field, CCD Camera
Imaging modes: Electron and ion beams, high and low vacuum
Analytical capabilities: 2D and 3D EBSD (EDAX Hikari Camera, TSL EBSD Software Suite), EDS (EDAX SD Apollo 10 Pegasus System, resolution 131 eV)
Attachments: Gas Injection Systems (GIS) for tungsten and platinum deposition, selective carbon etch and delineating etch, in-situ Omniprobe micromanipulator and a cryo can for minimizing contamination
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