The Inspect S is an instrument employed primarily for teaching and training users in basic SEM techniques. However, it can also be used as an analytical tool in its own right.
Electron source: Thermionic - tungsten filament
Accelerating voltage: 200 V- 30 kV
Resolution: 50 nm at 30 kV (SE)
Imaging detectors: Everhart-Thornley (SE/BSE), Solid state Backscattered Electron, Large Field, CCD Camera
Imaging modes: High and low vacuum
Analytical Capabilities: Energy Dispersive X-ray Spectroscopy, EDS (Oxford Instruments 50 mm2 X-Max silicon drift detector (SDD), MnKα resolution at 124 eV), Oxford Instruments Wavelength Dispersive X-ray Spectroscopy ( INCAWave 500, analysis for all elements down to boron, spectral resolution 2 eV )
Responsible:
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