The Quanta 200 3D is a dual-beam scanning electron microscope which combines normal SEM mode functionality with the capability of using a focussed ion beam for removing material by milling. This microscope is mainly used for preparing site-specific cross sectional specimens for TEM analysis.
Electron source: Thermionic - tungsten filament
Ion source: Ga+ ions
Accelerating voltage: 500 V- 30 kV
Resolution: 50 nm at 30 kV (SE)
Imaging detectors: Everhart-Thornley (SE/BSE), Large Field, CCD Camera
Imaging modes: Electron and Ion beams, high and low vacuum
Attachments: Gas Injection system (GIS) for tungsten and platinum deposition and an in-situ Omniprobe micromanipulator