FEI Helios EBS3

The Helios is a dual-beam SEM and FIB instrument. It is fitted with a field emission gun (FEG) and ultrahigh- resolution optics, giving this instrument improved electron beam resolution compared to the Quanta 200F. Furthermore, the machine is equipped with an electron backscatter diffraction (EBSD) detector for 2D and 3D crystallographic investigations and an energy dispersive X-ray spectrometer (EDS) for chemical characterizations.

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Helios

Electron source Field emission gun

Ion source Ga+ ions

Accelerating voltage 500 V - 30 kV

Resolution Better than 1.5 nm at 1 kV (SE)

Imaging detectors Everhart-Thornley (SE/BSE), Thru-the-Lens, Large Field, CCD Camera

Imaging modes Electron and ion beams at high vacuum

Analytical capabilities 2D and 3D EBSD (EDAX Hikari Camera, TSL EBSD Software Suite), EDS (EDAX SD Apollo 10 Pegasus System, resolution 131 eV)

Attachments Gas Injection Systems (GIS) for tungsten and platinum deposition, selective carbon etch and deliniating etch, in-situ Omniprobe micromnipulator and cryo can for minimizing contamination