FEI Quanta 200 3D SEM-FIB

The Quanta 200 3D is a dual-beam scanning electron microscope (SEM) and focused ion beam (FIB) instrument. Combining these two techniques creates a versatile tool for sub-micron scale material removal and characterization. This microscope is mainly usedfor preparing site-specific cross sectional specimens for transmission electron microscopes (TEM).

Quanta

Zoli

Electron source Thermionic - tungsten filament

Ion source Ga+ ions

Accelerating voltage 500 V - 30 kV

Resolution 50 nm at 30 kV (SE)

Imaging detectors Everhart-Thornley (SE/BSE), Large Field, CCD Camera

Imaging modes Electron and Ion beams, high and low vacuum

Attachments Gas Injection System (GIS) for tungsten and platinum deposition and in-situ Omiprobe micromanipulator