DTU Cen
DTU Nanolab
Marco Beleggia

Marco Beleggia

Associate Professor

Center for Electron Nanoscopy

Technical University of Denmark

Fysikvej

Building 307, room 120

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2019
 

Optical property – composition correlation in noble metal alloy nanoparticles studied with EELS

Kadkhodazadeh, Shima ; Nugroho, Ferry Anggoro Ardy ; Langhammer, Christoph ; Beleggia, Marco ; Wagner, Jakob Birkedal
in: ACS Photonics, vol: 6, issue: 3, pages: 779–786

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2019     |    DOI: https://doi.org/10.1021/acsphotonics.8b01791

2018
  PDF

5-nm-lines in Organic Ice Resists

Elsukova, Anna ; Han, Anpan ; Beleggia, Marco
Presented at:
44th International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2018

 

Charging of carbon thin films in scanning and phase-plate transmission electron microscopy

Hettler, Simon ; Kano, Emi ; Dries, Manuel ; Gerthsen, Dagmar ; Pfaffmann, Lukas ; Bruns, Michael ; Beleggia, Marco ; Malac, Marek
in: ULTRAMICROSCOPY, vol: 184, pages: 252-266

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2018     |    DOI: https://doi.org/10.1016/j.ultramic.2017.09.009

  PDF

Color generation via electron beam irradiating organic ice

Zhao, Ding ; Tiddi, William ; Elsukova, Anna ; Beleggia, Marco ; Han, Anpan ; Qiu, Min
Presented at:
44th International conference on Micro and Nano Engineering

Type: Poster (Peer reviewed)

Status: Published     |    Year: 2018

 

Effect of Molecular Weight on the Feature Size in Organic Ice Resists

Elsukova, Anna ; Han, Anpan ; Zhao, Ding ; Beleggia, Marco
in: Nano letters, vol: 18, issue: 12, pages: 7576-7582

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2018     |    DOI: https://doi.org/10.1021/acs.nanolett.8b03130

  PDF

Electron-beam patterning organic ice resists

Elsukova, Anna ; Tiddi, William ; Han, Anpan ; Beleggia, Marco
Presented at:
The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2018

  PDF

Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China

Zhao, Ding ; Hong, Yu ; Tiddi, William ; Elsukova, Anna ; Beleggia, Marco ; Qiu, Min ; Han, Anpan
Presented at:
The 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP)

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2018

  PDF

Organic ice resist lithography with an environmental TEM

Elsukova, Anna ; Han, Anpan ; Beleggia, Marco
Presented at:
69th Annual Conference of the Nordic Microscopy Society

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2018

  PDF

Organic ice resists: effect of electron beam irradiation on frozen hydrocarbons

Elsukova, Anna ; Han, Anpan ; Beleggia, Marco
Presented at:
The 13th meeting of the “Ionizing Radiation and Polymers” symposium

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2018

 

Organic ice resists for 3D electron-beam processing: Instrumentation and operation

Tiddi, William ; Elsukova, Anna ; Beleggia, Marco ; Han, Anpan
in: Microelectronic Engineering, vol: 192, pages: 38-43

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2018     |    DOI: https://doi.org/10.1016/j.mee.2018.01.021